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1

Replication of Micro- and Nanostructures on Polymer Surfaces

Holzer, Clemens, Gobrecht, Jens, Schift, Helmut, Solak, Harun

Journal:

Macromolecular Symposia

Year:

2010

Language:

english

File:

PDF, 863 KB

english, 2010

2

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Schift, Helmut, Urwyler, Prabitha, Kristiansen, Per Magnus, Gobrecht, Jens

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2014

Language:

english

File:

PDF, 8.20 MB

english, 2014

3

Sub-micron silver wires on non-planar polymer substrates fabricated by thermal nanoimprint and back injection molding

Xie, Sijia, HorvÃ¡th, Barbara, Werder, Jerome, Schift, Helmut

Journal:

Microelectronic Engineering

Year:

2020

File:

PDF, 8.51 MB

2020

4

Surface patterned polymer micro-cantilever arrays for sensing

Prabitha Urwyler, Helmut Schift, Jens Gobrecht, Oskar Häfeli, Mirco Altana, Felice Battiston, Bert Müller

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 726 KB

english, 2011

5

Nanoimprint lithography: An old story in modern times? A review

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2008

Language:

english

File:

PDF, 2.81 MB

english, 2008

6

SPIE Proceedings [SPIE Integrated Optoelectronics '94 - Lindau, Federal Republic of Germany (Sunday 10 April 1994)] Nanofabrication Technologies and Device Integration - Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography, electroforming, micromolding, and embossing

Abraham, Michael, Bauer, Hans-Dieter, Ehrfeld, Wolfgang, Gerner, Mathias M., Lacher, Manfred, Lehr, Heinz, Loewe, Holger, Michel, Andreas, Ruf, Andreas, Schift, Helmut, Schmidt, Andreas, Weber, Lutz,

Year:

1994

Language:

english

File:

PDF, 430 KB

english, 1994

7

Sub-micron silver wires on non-planar polymer substrates fabricated by thermal nanoimprint and back injection molding

Xie, Sijia, HorvÃ¡th, Barbara, Werder, Jerome, Schift, Helmut

Journal:

Micro and Nano Engineering

Year:

2020

File:

PDF, 1.49 MB

2020

8

Hybrid bendable stamp copies for molding fabricated by nanoimprint lithography

Helmut Schift, Sunggook Park, Jens Gobrecht, Fabian Meier, Werner Raupach, Konrad Vogelsang

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 349 KB

english, 2005

9

Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 567 KB

english, 2014

10

Fabrication of mesas with micro- and nanopatterned surface relief used as working stamps for step and stamp imprint lithography

Schleunitz, Arne, Spreu, Christian, Haatainen, Tomi, Klukowska, Anna, Schift, Helmut

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 634 KB

english, 2010

11

Fabrication of ordered nanospheres using a combination of nanoimprint lithography and controlled dewetting

Schleunitz, Arne, Spreu, Christian, Lee, JaeJong, Schift, Helmut

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2010

Language:

english

File:

PDF, 702 KB

english, 2010

12

Nanoimprint lithography: 2D or not 2D? A review

Journal:

Applied Physics A: Materials Science & Processing

Year:

2015

Language:

english

File:

PDF, 5.86 MB

english, 2015

13

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Advances in Patterning Materials and Processes XXXIII - mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

Hohle, Christoph K., Younkin, Todd R., Pfirrmann, Stefan, Kirchner, Robert, Lohse, Olga, Guzenko, Vitaliy A., Voigt, Anja, Harder, Irina, Kolander, Anett, Schift, Helmut, Grützner, Gabi

Year:

2016

Language:

english

File:

PDF, 4.21 MB

english, 2016

14

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Replicated diffractive optical lens components for laser-diode-to-fiber coupling in optical bench arrangements

Soechtig, Juergen, Schift, Helmut, Patterson, Bruce D., Westenhoefer, S., Motamedi, M. Edward, Herzig, Hans Peter

Year:

1997

Language:

english

File:

PDF, 2.15 MB

english, 1997

15

Nano-Imprint-Molding Resists for Lithography

Schift, Helmut, Park, Sunggook, Gobrecht, Jens

Journal:

Journal of Photopolymer Science and Technology

Year:

2003

File:

PDF, 1.46 MB

2003

16

Next-generation lithography – an outlook on EUV projection and nanoimprint

Schoot, Jan van, Schift, Helmut

Journal:

Advanced Optical Technologies

Language:

english

File:

PDF, 383 KB

english

17

Erratum to “Nanoimprint meets microfluidics: Development of metal wires from nanoparticle ink filled capillaries” [Micro and Nano Engineering Vol. 3 (2019) 22–30]

Horváth, Barbara, Křivová, Barbora, Schift, Helmut

Journal:

Micro and Nano Engineering

Year:

2019

Language:

english

File:

PDF, 130 KB

english, 2019

18

Interdigitated electrode arrays made by capillary filling and spin coating for UV-sensor fabrication

Horváth, Barbara, Al Jassin-Al-Hashemi, Ethouba, Schift, Helmut

Journal:

Flexible and Printed Electronics

Year:

2019

Language:

english

File:

PDF, 1.39 MB

english, 2019

19

Chemical patterning of sub-50-nm half pitches via nanoimprint lithography

Sunggook Park, Sina Saxer, Celestino Padeste, Harun H. Solak, Jens Gobrecht, Helmut Schift

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 303 KB

english, 2005

20

Surface structuring of textile fibers using roll embossing

Helmut Schift, Marcel Halbeisen, Urs Schütz, Benjamin Delahoche, Konrad Vogelsang, Jens Gobrecht

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 242 KB

english, 2006

21

Fast heating and cooling in nanoimprint using a spring-loaded adapter in a preheated press

Helmut Schift, Sandro Bellini, Jens Gobrecht, Frank Reuther, Mike Kubenz, Morten Bo Mikkelsen, Konrad Vogelsang

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.30 MB

english, 2007

22

Fabrication of polymer photonic crystal slabs using nanoimprint lithography

Choon-Gi Choi, Chul-Sik Kee, Helmut Schift

Journal:

Current Applied Physics

Year:

2006

Language:

english

File:

PDF, 296 KB

english, 2006

23

Coarse-grain method for modeling of stamp and substrate deformation in nanoimprint

Vadim Sirotkin, Alexander Svintsov, Helmut Schift, Sergey Zaitsev

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.22 MB

english, 2007

24

Measurement of demolding forces in full wafer thermal nanoimprint

Vera Trabadelo, Helmut Schift, Santos Merino, Sandro Bellini, Jens Gobrecht

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 362 KB

english, 2008

25

Shape control of polymer reflow structures fabricated by nanoimprint lithography

Helmut Schift, Christian Spreu, Arne Schleunitz, JaeJong Lee

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 788 KB

english, 2011

26

Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing

Arne Schleunitz, Helmut Schift

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 434 KB

english, 2011

27

Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone

Arne Schleunitz, Christian Spreu, Tapio Mäkelä, Tomi Haatainen, Anna Klukowska, Helmut Schift

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 691 KB

english, 2011

28

Nano-Mechanical Transduction of Polymer Micro-Cantilevers to Detect Bio-Molecular Interactions

Prabitha Urwyler, Joachim Köser, Helmut Schift, Jens Gobrecht, Bert Müller

Journal:

Year:

2012

Language:

english

File:

PDF, 946 KB

english, 2012

29

Perforated polymer membranes fabricated by nanoimprint

Helmut Schift, Sandro Bellini, Jens Gobrecht

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 184 KB

english, 2006

30

Disposable polymeric micro-cantilever arrays for sensing

Prabitha Urwyler, Oskar Häfeli, Helmut Schift, Jens Gobrecht, Felice Battiston, Bert Müller

Journal:

Procedia Engineering

Year:

2010

File:

PDF, 3.88 MB

2010

31

Mechanical and chemical stability of injection-molded microcantilevers used for sensing

Prabitha Urwyler, Alfons Pascual, Per Magnus Kristiansen, Jens Gobrecht, Bert Müller, Helmut Schift

Journal:

Journal of Applied Polymer Science

Year:

2012

Language:

english

File:

PDF, 1.42 MB

english, 2012

32

Anti-adhesive layers on nickel stamps for nanoimprint lithography

Sunggook Park, Helmut Schift, Celestino Padeste, Bernhard Schnyder, Rüdiger Kötz, Jens Gobrecht

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 275 KB

english, 2004

33

Nanostructuring of anti-adhesive layers by hot embossing lithography

Sunggook Park, Celestino Padeste, Helmut Schift, Jens Gobrecht

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 552 KB

english, 2003

34

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Schleunitz, Arne, Schift, Helmut

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 592 KB

english, 2010

35

Controlled co-evaporation of silanes for nanoimprint stamps

Schift, Helmut, Saxer, Sina, Park, Sunggook, Padeste, Celestino, Pieles, Uwe, Gobrecht, Jens

Journal:

Year:

2005

Language:

english

File:

PDF, 190 KB

english, 2005

36

SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - San Diego, California (Sunday 11 March 2012)] Bioinspiration, Biomimetics, and Bioreplication 2012 - Micro- and nanostructured polymer substrates for biomedical applications

Althaus, Jasmin, Urwyler, Prabitha, Padeste, Celestino, Heuberger, Roman, Deyhle, Hans, Schift, Helmut, Gobrecht, Jens, Pieles, Uwe, Scharnweber, Dieter, Peters, Kirsten, Müller, Bert, Lakhtakia, Akhl

Year:

2012

Language:

english

File:

PDF, 9.39 MB

english, 2012

37

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Schleunitz, Arne, Guzenko, Vitaliy A, Messerschmidt, Martin, Atasoy, Hakan, Kirchner, Robert, Schift, Helmut

Journal:

Nano Convergence

Year:

2014

Language:

english

File:

PDF, 2.62 MB

english, 2014

38

Selective profile transformation of electron-beam exposed multilevel resist structures based on a molecular weight dependent thermal reflow

Schleunitz, Arne, Guzenko, Vitaliy A., Schander, Andreas, Vogler, Marko, Schift, Helmut

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 819 KB

english, 2011

39

3D visualization of mold filling stages in thermal nanoimprint by white light interferometry and atomic force microscopy

Schift, Helmut, Kim, Geehong, Lee, Jaejong, Gobrecht, Jens

Journal:

Year:

2009

Language:

english

File:

PDF, 1.14 MB

english, 2009

40

Anti-sticking layers for nickel-based nanoreplication tools

Padeste, Celestino, Bellini, Sandro, Siewert, Dorota, Schift, Helmut

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 879 KB

english, 2014

41

A Novel Approach to Produce Protein Nanopatterns by Combining Nanoimprint Lithography and Molecular Self-Assembly

Falconnet, Didier, Pasqui, Daniela, Park, Sunggook, Eckert, Rolf, Schift, Helmut, Gobrecht, Jens, Barbucci, Rolando, Textor, Marcus

Journal:

Year:

2004

Language:

english

File:

PDF, 556 KB

english, 2004

42

Fabrication of polymer photonic crystals using nanoimprint lithography

Schift, Helmut, Park, Sunggook, Jung, Bokyung, Choi, Choon-Gi, Kee, Chul-Sik, Han, Sang-Pil, Yoon, Keun-Byoung, Gobrecht, Jens

Journal:

Year:

2005

Language:

english

File:

PDF, 819 KB

english, 2005

43

Liquid Crystal Alignment on Chemical Nanopatterns: Control over Azimuthal and Polar Alignment

Scharf, Toralf, Park, Sunggook, Padeste, Celestino, Schift, Helmut, Basturk, Naci, Grupp, Joachim

Journal:

Molecular Crystals and Liquid Crystals

Year:

2005

Language:

english

File:

PDF, 400 KB

english, 2005

44

[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bilayer wire-grid polarizers for DUV to IR fabricated using EUV interference and nanoimprint lithography

Wang, Li, Schift, Helmut, Kristiansen, Per Magnus, Jefimovs, Konstantins, Solak, Harun H., Gobrecht, Jens, Ekinci, Yasin

Year:

2013

Language:

english

File:

PDF, 562 KB

english, 2013

45

Air-suspended two-dimensional polymer photonic crystal slab waveguides fabricated by nanoimprint lithography

Choi, Choon-Gi, Han, Young-Tak, Kim, Jin Tae, Schift, Helmut

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 513 KB

english, 2007

46

Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures

Schleunitz, Arne, Spreu, Christian, Vogler, Marko, Atasoy, Hakan, Schift, Helmut

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 909 KB

english, 2011

47

Mobility based 3D simulation of selective, viscoelastic polymer reflow using surface evolver

Kirchner, Robert, Schift, Helmut

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 3.10 MB

english, 2014

48

Ultraviolet-ozone surface cleaning of injection-molded, thermoplastic microcantilevers

Urwyler, Prabitha, Pascual, Alfons, Müller, Bert, Schift, Helmut

Journal:

Journal of Applied Polymer Science

Year:

2015

Language:

english

File:

PDF, 1.11 MB

english, 2015

49

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Alternative Lithographic Technologies VI - Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Resnick, Douglas J., Bencher, Christopher, Schift, Helmut

Year:

2014

Language:

english

File:

PDF, 2.78 MB

english, 2014

50

NANOPATTERNED POLYMER THIN FILMS

KEE, CHUL-SIK, YOON, KEUN BYUNG, CHOI, CHOON-GI, KIM, JIN-TAE, HAN, SANG PIL, PARK, SUNGGOOK, SCHIFT, HELMUT

Journal:

Journal of Nonlinear Optical Physics & Materials

Year:

2005

Language:

english

File:

PDF, 309 KB

english, 2005

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